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After objects are irradiated by laser, the maximum amount of reflected light must be collected in order to obtain the most precise three-dimensional images, particularly of vehicles and pedestrians. LiDAR systems therefore require mirrors with a large surface area in order to maximize light collection. Additionally, a wide scanning angle is required for accurate vehicle periphery monitoring. Mitsubishi Electric's new development incorporates the industry's largest electromagnetic MEMS mirror, measuring 7mm by 5mm, in a lightweight design which is able to scan horizontally and vertically. Despite its size, the unique structure of the MEMS mirror facilitates a reduction in weight without sacrificing rigidity. The lightweight design and high electromagnetically generated driving force allows the mirror to achieve large horizontal movement of ±15 degrees. Vertical movement is currently ±3.4 degrees, and Mitsubishi Electric aims to increase this to ±6.0 degrees or more by improving the beam structure of the MEMS.

The MEMS mirror can be produced in large quantities on a silicon substrate using semiconductor-processing technology, making it suitable for mass production. In addition, it uses fewer parts compared to mirrors driven mechanically with motors, which will contribute to the durability of the LiDAR solution.