1D MEMS scanning mirror

Our 1D MEMS mirrors are designed for resonant operation with optical scanning angle as large as 86 deg. Millimeter size mirrors with resonant frequencies in the range from 500Hz to several kilohertz are available.

The 1D MEMS mirror is coated with gold for high reflectivity in NIR and IR applications such as structured light projection for 3D camera, bio-medical sensing, laser printing, LiDAR and etc.