Built for precision temperature control and uniform heating, the Inconel Substrate Heater is the perfect tool for a variety of thin film applications. The oxidation and chemical resistant metal alloy heater is designed to reach temperatures up to 850°C. It is compatible with reactive sputtering, PLD, PVD, e-beam, thermal evaporation, PECVD, ALD, in UHV or inert (Ar, N2, He, H2) and reactive O 2 , Ozone, CO 2 , C 2 H 2 , CH 4 , NH 3 , SiH 4 , H 2 O, air and metal-organic precursors from pressure 10E-1 Torr through high vacuum up to 10E-8 Torr.

The temperature uniformity is within 5-10%. All substrate heater models come with stainless steel shield/collar with 6 x4-40 tapped holes for sample clamping. They have integrated inbuilt K-type thermocouple (with 24″ inch long flexible fiber glass shielded cables) mounted from backside approaching near the surface of the hot surface for accurate temperature measurement. Heater and thermocouple wires have two 36″ long glass fiber insulated and flexible conductors for heater power and temperature measurement, respectively.

Blue Wave’s heater’s back plate has one 10-32 tapped hole in the center for heater mounting. The Inconel Substrate Heater is suitable for epitaxial growth, doping, catalytic reactions, in-situ surface science as a function of temperature, and annealing of oxides, nitrides, carbides, metals, alloys, graphene, CNTs, diamond and complex multicomponent and multilayer thin films. It can also be used for gas sensor characterization, temperature dependent electrical measurement of devices at high temperature in air, vacuum or N 2 atm.

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