Microsoft CEO Satya Nadella received a cash bonus of $3.6 million for the company’s 2014 fiscal year —141 percent of his target award — along with stock worth more than $7 million, according to a regulatory filing by the company this afternoon.

The awards are part of the broader pay structure for Nadella that was announced in February, after he was appointed the third CEO in the company’s history. Under the plan, Nadella could have received a cash award of as much as 300% of his target. Nadella received a base salary of $918,917.

Factors considered by the board included “Mr. Nadella’s performance against his core priorities, the financial and operational performance of the Company, and the financial performance of the Company relative to a group of large technology companies,” according to the filing.

By comparison, former Microsoft CEO received a base salary of 697,500 and a bonus of 550,000, representing 79 percent of his target, during the 2013 fiscal year. Ballmer, the largest individual Microsoft shareholder, didn’t receive stock as compensation when he was chief executive.

Nadella enjoyed a honeymoon period in his initial months as Microsoft CEO, winning praise for encouraging a more open and nimble culture at the company, before stumbling recently in his public comments about women and pay in the technology industry. Earlier today, he again addressed the situation in an interview with USA Today, saying he “was just wrong.”

Here’s a chart from the filing, showing compensation for Nadella and other named Microsoft execs.