LONDON – The Dutch semiconductor equipment maker ASML agreed on Wednesday to buy Cymer, a maker of microchip components, for 1.95 billion euros ($2.6 billion).

The cash-and-stock deal is an attempt by ASML, which supplies companies like Intel and Samsung, to develop new microchip technology, according to a company statement.

“We believe that this transaction will improve our capabilities to bring new technologies to our customers,” ASML’s chief executive, Eric Meurice, said in a statement.

Under the terms of the deal, shareholders in Cymer, based in San Diego, will receive $20 and 1.15 ASML shares for each Cymer share. The offer represents a premium of about 70 percent to Cymer’s closing share price on Tuesday.

Shares of ASML fell about 3 percent in morning trading in Amsterdam on Wednesday.

ASML said it would continue to operate Cymer as a stand-alone division in the United States.

Analysts cautioned that the deal, which is expected to close in the first half of 2013, could add extra complexity to ASML’s operations and slow down the company’s pipeline of new semiconductor equipment.

ASML announced agreements this year with a number of its customers to sell a combined 23 percent stake in itself. Cash provided by the clients, including the Taiwan Semiconductor Manufacturing Company, has been set aside to accelerate the development of next-generation microchip technology.