Invensense MPU6050 6-axis MEMS IMU : weekend die-shot

MEMS is probably the most requested thing we are asked about. Year ago we unsucesfully tried to take a photo of MPU6050. Now it's time for revenge!Invensense MPU6050 is an integrated gyroscope and accelerometer with 16-bit readings. It contains 2 dies, soldered/welded face-to-face in multiple places (that's what was causing us troubles last time, required temperature for separation exceeded 600C).On the overview photo you can see how not-flat they are. On a bigger die MEMS part is 28µm above surface, on smaller die - 100 µm above. Also, there is logic right under MEMS on the bigger die.Size of big die is 2782x2718 µm, small die - 2778x2195 µm.Small die, focus on top level. Width of smallest teethes is 1µm.These teethes allow to sense their movement by change of capacitance between electrodes.Small die, focus on bottom level:Big die:Below MEMS one can find conventional digital logic, ~250nm halfpitchSRAM, cell area is 10.13 µmStandard-cell-based logic: