Prime Minister Kevin Rudd is still cold on the idea of a Senate probe into the Church of Scientology, but has left the door open for possible support for another kind of inquiry.

Independent Senator Nick Xenophon has vowed to make a third push for a Senate inquiry into the Church after last year airing allegations made by ex-members of coerced abortions, criminal activity and abuse.

But both major parties will not support the inquiry, saying the Senate is not the right place to examine criminal allegations.

Mr Rudd has told Channel 7 he still has deep concerns about alleged mistreatment of members but is not convinced a Senate inquiry should go ahead.

"We've got to be very careful about using parliamentary forums to air potentially criminal charges or criminal allegations," he said.

"Let me take some further advice on the separation between general concerns about the Church of Scientology - many of which I deeply share - and on the other hand, allegations of criminality... which are properly left with law enforcement authorities.

"If that's capable of some separation, maybe."

Senator Xenophon has told ABC2 he thinks the Government's position is moving.

"I think that there is a shift in the mood and the language and I'll be working on that in the Parliamentary break," he said.

"Whether there are other options in terms of an independent inquiry, that could be a way forward.

"I still think the the best way forward is to have a Senate inquiry."

The Church has welcomed the news there will be no inquiry for now, saying anyone with allegations of criminal behaviour should go to the police.